非接觸式薄膜方塊電阻測量儀
昊量光電新推出用于導(dǎo)電薄膜和薄金屬層方塊電阻測量的非接觸式薄膜方塊電阻測量儀EddyCus TF Series颖变，這款非接觸式薄膜方塊電阻方阻測量儀可以非接觸式實時測量，對導(dǎo)電薄膜和金屬方塊電阻精確測量听想，表征已被隱藏和封裝的導(dǎo)電層腥刹，并把測量數(shù)據(jù)保存和導(dǎo)出。 可用于方塊電阻汉买，方阻測量衔峰。非接觸式方塊電阻方阻測量，替代四探針傳統(tǒng)測量蛙粘。
非接觸式薄膜四方針方塊電阻方阻測量儀主要測試對象：
鍍膜建筑玻璃垫卤，如LowE
顯示器，觸摸屏和平板顯示器
OLED和LED
智能玻璃
石墨烯層
光伏晶圓和電池
半導(dǎo)體晶片
金屬化層和晶圓金屬化
電池電極
導(dǎo)電涂布紙和導(dǎo)電紡織品
非接觸式單點方阻測試儀EddyCus TF Lab 2020SR
EddyCus TF Lab 2020SR是非接觸式單點薄層電阻測量系統(tǒng)出牧。該裝置包含一個渦流傳感器組穴肘，感應(yīng)弱電流到導(dǎo)電薄膜和材料。非接觸式薄膜方塊電阻測量儀試樣中的感應(yīng)電流產(chǎn)生與測量對象的片電阻相關(guān)的電磁場舔痕。電渦流技術(shù)不依賴于表面特征或形貌梢褐。此外旺遮，非接觸式單點方阻測試儀不需要如已知的2或4點探針測試(2PP, 4PP)或霍爾效應(yīng)或范德波測量一樣進行任何形式的充分的樣品接觸或備樣。非接觸式單點方阻測試儀既不需要設(shè)置測試結(jié)構(gòu)盈咳，也不受表面粗糙度或非導(dǎo)電封裝或鈍化層的影響耿眉。此外，測量不會對被測薄膜產(chǎn)生物理影響鱼响。渦流儀器不存在機械磨損鸣剪，使用壽命長。它的獨立性與接觸質(zhì)量和它的高速允許實現(xiàn)高重復(fù)性和準(zhǔn)確性丈积，有利于在研發(fā)和測試實驗室的各種薄膜的系統(tǒng)質(zhì)量保證筐骇。EddyCus工具可以由具有各種數(shù)據(jù)記錄和導(dǎo)出功能的SURAGUS軟件驅(qū)動，也可以由SURAGUS軟件開發(fā)套件驅(qū)動的客戶軟件驅(qū)動江滨。
非接觸式單點方阻測試儀軟件和設(shè)備控制：
非常用戶友好的軟件
直觀的觸摸顯示導(dǎo)航
實時測量板材電阻和層厚
軟件輔助手動映射選項
各種數(shù)據(jù)保存和導(dǎo)出選項
非接觸式薄膜四方針方塊電阻方阻測量儀產(chǎn)品規(guī)格表
| Measurement technology | Non-contact eddy current sensor |
| substrates | Foils, glass, wafer, etc. |
| Substrate area | 8 inch / 204 mm x 204 mm (open on three sides) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 25 mm (defined by the thickest sample) |
| Thickness measurement range of metal films (e.g. copper) | 2 nm – 2 mm (in accordance with sheet resistance (cf. our calculator)) |
| Device dimensions (w/h/d) | 11.4” x 5.5” x 17.5” / 290 mm x 140 mm x 445 mm |
| Weight | 10 kg |
| Further available features | Sheet resistance measurement / metal thickness monitor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.3% | < 0.5% | < 0.3% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistanc | |||||
非接觸式薄膜四方針方塊電阻方阻測量儀
非接觸式方阻成像儀EddyCus TF Map 2530SR
EddyCus TF Map 2530SR是一種非接觸式薄層電阻映射系統(tǒng)铛纬。該設(shè)備配備了一個運動的渦流傳感器，每次掃描可測量高達90000 (300 x 300)測量點的方塊電阻唬滑。由于這種技術(shù)不需要與標(biāo)本進行物理接觸告唆，該設(shè)備可以在飛行運動中進行測量。此外晶密，非接觸式單點方阻測試儀具有很高的準(zhǔn)確性擒悬，因為它是獨立于任何接觸質(zhì)量。非接觸式薄膜方塊電阻測量儀樣品中測量點的高密度確保了沒有遺漏任何效果或缺陷稻艰。此外懂牧，綜合分析功能支持生產(chǎn)和研發(fā)實驗室中各種薄膜的系統(tǒng)質(zhì)量保證。
產(chǎn)品規(guī)格：
| Measurement technology | Non-contact eddy current sensor |
| Substrates | Wafer, glass, foils etc. |
| Max. scanning area | 12 inch / 300 mm x 300 mm (larger upon request) |
| Edge effect correction / exclusion | 2 – 10 mm (depending on size, range, setup and requirements) |
| Max. sample thickness / sensor gap | 3 / 5 / 10 / 15 mm (defined by the thickest sample) |
| Thickness measurement of metal films (e.g. aluminum, copper) | 2 nm – 2 mm (in accordance with sheet resistance ()) |
| Scanning pitch | 1 / 2.5 / 5 / 10 / 25 mm (other upon request) |
| Measurement points per time (square shaped samples) | 100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes |
| Scanning time | 8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch) |
| Device dimensions (w/h/d) | 31.5” x 19.1” x 33.5” / 785 mm x 486 mm x 850 mm |
| Weight | 90 kg |
| Further available features | Metal thickness imaging, anisotropy and sheet resistance sensor |
| VLSR | LSR | MSR | HSR | VHSR | |
|---|---|---|---|---|---|
| 6 decades are measurable by one sensor, but with slightly affected accuracy | |||||
| Range [Ohm/sq] | 0.0001 – 0.1 | 0.1 – 10 | 0.1 – 100 | 10 – 2,000 | 1,000 – 200,000 |
| Accuracy / Bias | ± 1% | ± 1 – 3% | ± 3 – 5% | ||
| Repeatability (2σ) | < 0.5% | < 1% | < 0.5% | ||
| VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance | |||||
便攜式方塊電阻測試儀
EddyCus TF便攜式1010SR專用于工業(yè)環(huán)境中的接觸片電阻測量尊勿。它使各種行業(yè)的手工質(zhì)量保證成為可能僧凤。
| Measurement technology | Eddy current sensor |
| Measurement mode | Realtime at constant distance / contact |
| Substrates | Glass, foils etc. |
| Substrate sizes | Flat samples > 150 mm x 150 mm (6 inch x 6 inch) Curved editions are available for several applications (windshields etc.) |
| Measurement spot / high sensitivity zone | 40 mm diameter (1.6 inch) |
| Power | Lithium ion battery up to 20 h |
| Sheet resistance range (five setups available) | Type very low: 0.001 – 0.1 Ohm/sq Type low: 0.04 – 0.1 Ohm/sq Type standard: 0.3 – 30 Ohm/sq Type high: 0.3 – 50 Ohm/sq Type very high: 0.3 – 100 Ohm/sq |
| Thickness measurement of thin films (e.g. copper) | Additional feature, available range is 5 nm – 500 μm (in accordance with sheet resistance) |
| Emissivity range | Additional feature, available range is 0.003 – 0.5 |
| Accuracy (for planar solid surfaces, e.g. glass) | 0.001 – 50 Ohm/sq: < 3% 50 – 100 Ohm/sq: < 5% |
| DISPlay | 2.8 inch colored touch screen |
| Device dimensions (w/h/d) | 3.5” x 7” x 1.9” / 87 mm x 178 mm x 48 mm |
| Weight | 340 g |
| Interfaces | Bluetooth (optional) + data center |
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