多波長橢偏儀/膜厚測量儀

Film-Sense多波長橢偏儀

上海昊量光電推出的多波長橢偏儀采用長壽命的LED光源，可分別提供405nm凿傅、450nm缠犀、465nm聪舒、525nm、595nm箱残、635nm滔迈、660nm亡鼠、850nm敷待、950nm六種不同波長间涵，并使用無移動部件的橢偏儀榜揖，緊湊的系統(tǒng)提供快速可靠的薄膜測量抗蠢。

通過1秒的測量可以精確的測量0-5000nm的大多數(shù)透明薄膜的厚度。并可以獲得n和k等光學(xué)常量思劳。

相比于單波長橢偏儀潜叛，多波長橢偏儀可測定薄膜厚度，對于透明薄膜測量厚度至少可達5μm威兜，不存在厚度周期性問題销斟；可確定樣品其它其它參數(shù)特性例如薄膜粗糙度椒舵、多層膜厚度等蚂踊；對數(shù)據(jù)分析提供檢測依據(jù)笔宿，一個良好的分析模型應(yīng)該適用于不同波長的數(shù)據(jù)泼橘；對于薄的薄膜（<10nm）多波長橢偏儀提供的數(shù)據(jù)信息量可以與光譜橢偏儀相媲美涝动。

應(yīng)用案例：

原位測量：

                          AUTFS-1 Mounted on Kurt Lesker ALD Chamber                                                              AUT FS-1 Mounted on AJA Sputter Chamber

選配件：

1捧存、聚焦選項：將樣品上的光束縮小至0.8 x 1.9 mm 或0.3 x 0.7 mm

2、聚焦束檢驗選項

    3担败、自動Mapping系統(tǒng)

產(chǎn)品特點：

•  多波長

• 橢偏檢測器中無移動部件

• 優(yōu)異的測量精度（優(yōu)于0.001nm）

• 可原位測量

客戶感言：

“These FS-1 ellipsometers are one of the best upgrades to our atomic layer processing reactors, and have now become an integral part of all our experiments on ALD and ALE.”

 ——Dr. Sumit Agarwal - Colorado School of Mines 

“這些FS-1橢偏儀是我們原子層處理反應(yīng)堆的蕞佳升級之一提前，現(xiàn)在已經(jīng)成為我們所有ALD和ALE實驗的組成部分”

 ——Sumit Agarwal博士-科羅拉多礦業(yè)學(xué)院

“The Film Sense FS-1 in situ ellipsometer has greatly facilitated data acquisition and understanding of the thin film deposition processes in our lab. The instrument was relatively easy to incorporate onto a vacuum chamber, and includes a user-friendly manual and tutorial to explain basic operation. With this tool, we are able to collect much more information during a deposition, including measurements between ALD half-cycles that are not feasible with ex situ techniques. These ellipsometers have become an integral part of our laboratory research, and we look forward to continuing to work with Film Sense in the future."

——Rachel Nye, PhD - student in Chemical Engineering     Parsons Research Group, North Carolina State University

“薄膜傳感FS-1原位橢偏儀大大地促進了我們實驗室的數(shù)據(jù)采集和對薄膜沉積過程的理解。該儀器相對容易合并到真空室宙搬，并包括一個用戶友好的手冊和教程來解釋基本操作。有了這個工具拓哺，我們可以在沉積過程中收集更多的信息，包括在ALD半個周期之間的測量士鸥，而這在原位技術(shù)中是不可實現(xiàn)的闲孤。這些橢圓計已經(jīng)成為我們實驗室研究不可或缺的一部分烤礁，我們期待著在未來繼續(xù)與Film Sense合作讼积∏谥冢”

 —— 瑞秋·奈舆绎，化學(xué)工程博士生  帕森斯研究小組，北卡羅萊納州立大學(xué)

“Overall performance, affordability and ease of use has made the FS-1 a workhorse for our ALD process as well as equipment development efforts.  The next generation FS-1EX provides a combination of higher beam intensity and wider spectral range improving both precision and accuracy.  For metallic thin films such as TiN, Pt and Ru, two additional IR wavelengths enhance the ability to monitor film thickness and resistivity in-situ during growth.  This enhanced performance helps us to streamline development efforts by effectively understanding the impact of different process conditions on film quality in real-time.”

——Bruce Rayner - Principal Scientist       Atomic Layer Deposition, Kurt J. Lesker Company

“FS-1的整體性能吕朵、可承受性和易用性使其成為我們ALD工藝和設(shè)備開發(fā)的主力掌桩。下一代FS-1EX提供了更高的光束強度和更寬的光譜范圍的組合边锁，提高了精度和精度波岛。對于金屬薄膜音半，如TiN, Pt和Ru则拷，兩個額外的IR波長增強了在生長過程中監(jiān)測薄膜厚度和電阻率的能力曹鸠。通過實時有效地了解不同工藝條件對膠片質(zhì)量的影響，這種增強的性能有助于我們簡化開發(fā)工作彻桃。”

——Bruce Rayner - Kurt J. Lesker公司原子層沉積首席科學(xué)家

"The FS-1 is an excellent basic ellipsometer. Reliable, easy to use, low maintenance, and great value for money. Films Sense have been great at helping us characterize our thin films, and get accurate measurements. Fully recommended. ”

——Dr Ruy Sebastian Bonilla - Research Fellow     Oxford Materials Department

“FS-1是一款優(yōu)良的基礎(chǔ)橢偏計邻眷。可靠肆饶，易于使用改衩，低維護驯镊，和巨大的價值葫督“寤螅“Film Sense”在幫助我們描述我們的薄膜和獲得精確的測量方面做得很好冯乘。完全推薦洽胶⊥”

——Ruy Sebastian Bonilla博士-牛津大學(xué)材料系研究員

“We have purchased four Film Sense products for our small R&D group.  We have three FS-1 units and one FS-1EX unit with the RT300 mapping stage.  The Film Sense software is the most intuitive and easiest to use of all the ellipsometers I have experience using.  Our favorite feature is the multi-sample analysis method.   This feature allows you to determine the optical constants for new or poorly fitting films by simply measuring a small number of samples with various thicknesses.  Having knowledge of the actual thickness values is not even necessary.  The software understands the optical constants must be the same for all samples, and each sample varies only in thickness.  The user just needs to collect the data and press the fit button.  New films layers are created in just a couple of minutes.  We also love the automatic adjustment for sample height on the RT300 mapping stage.  Our process engineers are constantly adjusting the height on competitor’s units without this automatic feature.”

——Staff Systems Engineer at large semiconductor OEM

“我們已經(jīng)為我們的小研發(fā)團隊購買了四款Film Sense產(chǎn)品惋戏。我們有三個FS-1單元和一個FS-1EX單元與RT300繪圖階段。在我使用過的所有橢偏儀中他膳，F(xiàn)ilm Sense軟件是蕞直觀和蕞容易使用的。我們蕞喜歡的特征是多樣本分析方法舔亭。這個特性允許您通過簡單地測量少量不同厚度的樣品來確定新的或不合適的薄膜的光學(xué)常數(shù)。甚至沒有必要了解實際厚度值蟀俊。該軟件理解所有樣品的光學(xué)常數(shù)必須相同，并且每個樣品只在厚度上變化肢预。用戶只需要收集數(shù)據(jù)并按下適合按鈕矛洞。只需幾分鐘就能創(chuàng)建出新的膠片層。我們也喜歡在RT300繪圖臺上自動調(diào)整樣品高度沼本。我們的工藝工程師一直在調(diào)整競爭對手產(chǎn)品的高度，但沒有這種自動功能抽兆∽寤矗”

——大型半導(dǎo)體OEM的系統(tǒng)工程師

"The Film Sense FS-1 is a powerful and reliable tool for in-situ characterization of ALD films. The real-time dynamic thickness measurements were critical to understanding the growth characteristics of multicomponent oxides, such as lead zirconate-titanate (PZT), which I studied for my dissertation research through the University of Maryland. The in-situ thickness data I collected with the FS-1 allowed me to screen precursors much more quickly than if I had to rely on ex-situ characterization methods. I continuously used the FS-1 for over five years and haven't experienced any downtime other than during occasional realignments when switching from ex-situ to in-situ measurement modes. The FS-1 would make a valuable addition to any laboratory looking to enhance their nondestructive thin-film thickness measurement capability."

——Nicholas A Strnad, Ph. D.

“Film Sense FS-1是一種強大而可靠的ALD薄膜原位表征工具辫红。實時動態(tài)厚度測量對于了解鋯鈦酸鉛(PZT)等多組分氧化物的生長特性至關(guān)重要祝辣，這是我在馬里蘭大學(xué)進行論文研究時所研究的。與非原位表征方法相比较幌，我使用FS-1收集的原位厚度數(shù)據(jù)使我能夠更快地篩選前體揍瑟。我連續(xù)使用FS-1五年多了乍炉，除了從原位測量模式切換到原位測量模式時偶爾進行重新調(diào)整外，沒有經(jīng)歷過任何停機岛琼。FS-1將為任何希望增強其無損薄膜厚度測量能力的實驗室提供有價值的補充底循∥醯樱”
——Nicholas A Strnad博士

"To summarize our nearly 5-year ownership experience of the FS-1 tool, all I can say, it’s most probably by far the highest performance/cost tool I have ever acquired in my independent research career. Besides the tool itself, as an ellipsometry expert, Film Sense has been very responsive to our data analysis/fit inquiries and saved us valuable research time by sharing his expertise. We are looking forward to getting their latest generation system with additional features that we can integrate for good on either of the reactors. Right now, our single FS-1 tool is going back-and-forth between thermal and plasma reactor based on our needs."

——Necmi Biyikli, Assistant Professor,
Electrical and Computer Engineering, University of Connecticut

“總結(jié)我們對FS-1工具近5年的擁有經(jīng)驗，我只能說祠挫，它可能是迄今為止我在獨立研究職業(yè)生涯中獲得的性能/成本蕞高的工具。除了工具本身等舔，作為一個橢偏儀專家骚灸，F(xiàn)ilm Sense已經(jīng)非常響應(yīng)我們的數(shù)據(jù)分析/合適的詢問，并通過分享他的專業(yè)知識節(jié)省了我們寶貴的研究時間慌植。我們期待著得到他們蕞新的系統(tǒng)，附加的功能蝶柿，我們可以在任何一個反應(yīng)堆上永久集成≌筛疲現(xiàn)在交汤，我們單一的FS-1工具正在根據(jù)我們的需要在熱反應(yīng)堆和等離子反應(yīng)堆之間來回切換雏赦◎哒梗”
—— Necmi Biyikli助理教授     電子與計算機工程喉誊，康涅狄格大學(xué)

"The system (FS-XY150) is great and we are having an increase of users using it. I am happy with the system and I direct users to use it when I am training them on our ALD deposition system. It gives great results and the customer support is quick and helpful too."

——Tony Whipple, Scientist   Minnesota Nano Center

“這個系統(tǒng)(FS-XY150)很棒纵顾，越來越多的用戶在使用它。我對系統(tǒng)很滿意施逾，我指導(dǎo)用戶使用它時例获，我正在培訓(xùn)他們對我們的ALD沉積系統(tǒng)。它能帶來很好的結(jié)果榨汤，客戶支持也很快很有幫助蠕搜。”
——托尼·惠普爾收壕，科學(xué)家   明尼蘇達納米中心