橢偏儀在位表征電化學沉積的系統(tǒng)搭建（七）- 當前在位監(jiān)測裝置設計

正文

橢偏儀在位表征電化學沉積的系統(tǒng)搭建（七）- 當前在位監(jiān)測裝置設計

3當前在位監(jiān)測裝置設計

3.1真空鍍膜系統(tǒng)集成

在位橢偏儀測試裝置可分為兩類，一類是把設計的裝置直接和橢偏儀的兩個臂連接往扔，另外就是把設計好的裝置放置在兩臂之間贩猎，不改變橢偏儀原始的任何設計。后者設計使用更方便簡潔萍膛，有利于裝置的更換吭服。如圖1-12所示，是報道過的橢偏儀在位測試的裝置圖蝗罗。

圖1-12(a)是M.Magnozzi等設計一個實時在位光譜橢偏測量的高真裝置艇棕。該裝置是基于一個圓柱型管，在其兩端有兩個KF100法蘭(見圖1-12(a)串塑，左)沼琉。底部為KF100法蘭(a)作為支撐樣品的支架，安裝有加熱器和兩個雙動電偶桩匪；主體(b)容納幾個焊接在適當角度的法蘭打瘪，用于橢偏測量、電氣連接和泵送傻昙；頂部的KF100法蘭(c)闺骚，易于拆卸進入內(nèi)室；主機四個法蘭妆档，可根據(jù)需要容納真空計葛碧、氣體進口和薄膜沉積來源。因此过吻，通過改變附在法蘭上的元件(窗、進氣口蔗衡、源)纤虽，就有可能改變腔室的應用(不同入射角的橢偏測量、可控氣氛绞惦、不同薄膜沉積)逼纸。腔室的橫截面如圖1-12(a)右所示。由于三對法蘭配備了熔融硅窗济蝉，所以可以進行66°杰刽、70°和90°入射角下的橢圓偏振測量菠发。該腔體的設計可以安裝在WoollamM2000旋轉(zhuǎn)補償橢圓計d的臂上，無需對儀器進行任何修改贺嫂，本儀器的設計原則上與任何水平安裝的橢偏儀兼容滓鸠。

圖1-12(b)是Alexandre Zimmer等人設計的基于旋轉(zhuǎn)補償?shù)臋E偏儀的耦合流池，它直接安裝在測角儀上第喳，可以實現(xiàn)實時采集橢偏數(shù)據(jù)和電化學數(shù)據(jù)糜俗。耦合流池，由聚醚醚酮(PEEK)制成曲饱，包括兩個石英窗口悠抹，允許橢圓光束垂直經(jīng)過并到達工作電極表面再反射垂直經(jīng)過出去，其中橢偏光束的入射角是66°扩淀。流動池(約40毫升)楔敌，包含一個面對工作板的鉑柵對電極和一個KCl飽和甘汞參比電極。電池中電解液的更新是由兩個泵(型號323E,Watson Marlow)連接進驻谆、出口的管道實現(xiàn)卵凑。該裝置的優(yōu)點是垂直經(jīng)過石英窗口，zui大程度上減小了光在傳播途中的損耗旺韭，但是它的不足之處在于只可以在一個特定入角度(66°)下進行橢偏測量氛谜。

圖1-12(a)橢偏儀在位監(jiān)測真空沉鍍膜腔體：左圖為實驗裝置照片，腔體(a区端、c下值漫、上法蘭，b主腔體)插入M2000橢圓計的臂d中织盼。前景中放置的是渦輪分子泵e杨何；右圖為高真空室的截面；(b)電化學陽極化的三電極配置的耦合流池圖[18]：a沥邻、b危虱、c、d唐全、e分別為工作電極間埃跷、對電極、參比電極邮利、石英窗和電解液進弥雹、出口

3.2液流腔體(flow cell)

zui常用液流腔體電解池的結(jié)構(gòu)是圖1-13所示的梯形室(從側(cè)面看)，通常池體由提供流體進出的兩個口及實現(xiàn)光的入射與出射的兩個觀察窗口組成延届。流體體可為液體剪勿、蒸汽或氣體，由外部泵或氣體流量控制器注入池體方庭。觀察窗口需要根據(jù)入射角的不同而改變厕吉，所以在設計池體之前要考慮使用樣本的布魯斯特角度或偽布魯斯特角度來決定特定的入射角酱固，以此提高信號靈敏度。

圖1-13流動型池體側(cè)視圖

圖1-14(a)是文獻中用制作使用的池體實物圖头朱，可以看到其觀察窗口位于短邊側(cè)面运悲，液體進出口位于長邊側(cè)面。文中用該池體在200ms的時間分辨率和400nm波長下監(jiān)測C12E5的平衡吸附髓窜。圖1-14(b)是另外一篇文獻中報道的常規(guī)硅晶圓上進行參考測試的常流池實物圖和側(cè)面示意圖扇苞，可以看到液體的進出從池體的頂端實現(xiàn)，觀察窗口位于側(cè)面寄纵，入射角固定為75°鳖敷。圖1-14(c)是在(b)中常規(guī)流池的基礎上進行改進的池體設計及制作過程圖，整體形狀和(b)一樣程拭，液流進出也是在上面定踱。不同的是把不透明的池體改為透明材料，池體更小恃鞋，且監(jiān)測窗口在池體下方崖媚。

圖1-14(a)流動池體實物圖；(b)用于在固定的75°入射角的硅晶圓上進行參考測試的常流池實物圖和側(cè)面示意圖恤浪；(c)中[A-F]基于膜結(jié)構(gòu)的密封腔室的制造畅哑，以及帶有薄膜的組裝流池硅膜，[G]和[H]顯示池體和膜的邊緣水由，[I?K]基于半透明膜的橢偏儀測試流體設計示意圖

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