橢偏儀在位表征電化學(xué)沉積的系統(tǒng)搭建（二十四）- 全波段沉積過(guò)程的準(zhǔn)在位測(cè)試分析-不同時(shí)間所測(cè)試的光學(xué)

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橢偏儀在位表征電化學(xué)沉積的系統(tǒng)搭建（二十四）- 全波段沉積過(guò)程的準(zhǔn)在位測(cè)試分析-不同時(shí)間所測(cè)試的光學(xué)常數(shù)

不同時(shí)間所測(cè)試的光學(xué)常數(shù)(n伴郁，k)

從圖4-6(a耿战，c)中看，隨著時(shí)間的變化蛾绎，光學(xué)常數(shù)n值發(fā)生變化昆箕。當(dāng)沉積時(shí)間為180s的時(shí)候，在500-800nm的長(zhǎng)波范圍租冠，其值從襯底(0s)時(shí)接近0增加到1.3鹏倘，這也意味著新的物質(zhì)增加，導(dǎo)致襯底的信息減少顽爹。在沉積時(shí)間增加到360s時(shí)纤泵，在410nm附近處現(xiàn)一個(gè)較明顯的波包，同時(shí)在500-800nm區(qū)域出現(xiàn)一個(gè)波包，大約在700nm附近捏题。當(dāng)沉積時(shí)間增加到540s之后玻褪，n的值恢復(fù)到沉積180s附近」可以看出隨著沉積的變化带射，沉積的CU₂O導(dǎo)致n值在360s的時(shí)候有額外的峰出現(xiàn)。

圖4-6(b循狰，d)中顯示吸收系數(shù)k值隨著時(shí)間的變化窟社，與反射率R的趨勢(shì)一致。在所測(cè)波長(zhǎng)范圍內(nèi)的k值在沉積過(guò)程都有所降低绪钥，特別是在長(zhǎng)波500-800nm的范圍內(nèi)明顯灿里。當(dāng)沉積時(shí)間為180s的時(shí)候，k的值大約從4.3降到1.5程腹，在波長(zhǎng)為300-500nm之間存在兩個(gè)波包(330nm匣吊，400nm)。當(dāng)沉積時(shí)間增加到360s時(shí)寸潦，在短波300-500nm的波包變得較明顯(330nm色鸳，380nm)，整體的k值都有所增加甸祭。當(dāng)沉積時(shí)間增加到540s時(shí)缕碎，k的值大小恢復(fù)到沉積180s時(shí)，但是在500-800nm范圍出現(xiàn)兩個(gè)波包(510nm池户，670nm)咏雌。到720s的時(shí)候，在500-800nm范圍只有一個(gè)大的波包校焦，并且k值較大赊抖。到900s和1080s時(shí)，在500-800nm范圍時(shí)寨典，又出現(xiàn)兩個(gè)波包但是峰位有所變化氛雪。因此同樣的，k值顯示在360s比其它沉積時(shí)間有較大的吸收值耸成。由于隨著沉積時(shí)間的增加报亩，所沉積的物質(zhì)的物相可能發(fā)生變化以及厚度和表面粗糙度的變化。

新的物相會(huì)同時(shí)影響到折射率n和消光系數(shù)k井氢，在圖4-6(b弦追，d)吸收系數(shù)中觀察到在長(zhǎng)波范圍內(nèi)(500-800nm)的波包變化但是在圖4-6(a，c)中的折射率系數(shù)n卻沒(méi)有監(jiān)測(cè)到花竞，這意味著這個(gè)吸收系數(shù)的波包變化可能是沉積材料的厚度導(dǎo)致的劲件。對(duì)于沉積時(shí)間為360s時(shí)，相對(duì)于其它沉積時(shí)間n值和k值都有很大的變化，這可能是360s時(shí)的物相較為特殊零远。由于物相包括新物質(zhì)或者是結(jié)構(gòu)苗分，如顆粒尺寸，所以這可能是由于在360s時(shí)沉積的CU₂O成分或者是此時(shí)得到的顆粒尺寸或者結(jié)構(gòu)有所不同牵辣，需要進(jìn)一步驗(yàn)證摔癣。

圖4-6不同沉積時(shí)間得到的橢偏數(shù)據(jù)圖(a，c)n纬向，(b供填，d)k

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