Absolute accuracy : Deviation between the actual position and the desired one. If a stage has to move 100μm but it moves only 99.99μm (measured through an ideal scale), then the inaccuracy is 10nm. The permanent positioning error along an axis is designated as accuracy. Absolute accuracy is aff?ected by calibration errors, linearity errors, hysteresis, Abbe errors and positioning noise.
絕對(duì)精度：實(shí)際位置與所需位置之間的偏差诈茧。 如果一個(gè)平臺(tái)必須移動(dòng) 100μm产喉，但它僅移動(dòng) 99.99μm（通過理想標(biāo)尺測(cè)量），則誤差為 10nm敢会。 沿軸的永久定位誤差稱為精度曾沈。 絕對(duì)精度受校準(zhǔn)誤差、線性誤差鸥昏、滯后塞俱、阿貝誤差和定位噪聲的影響。
壓電位移臺(tái)常用術(shù)語(yǔ)中英文對(duì)照表
Absolute accuracy : Deviation between the actual position and the desired one. If a stage has to move 100μm but it moves only 99.99μm (measured through an ideal scale), then the inaccuracy is 10nm. The permanent positioning error along an axis is designated as accuracy. Absolute accuracy is aff?ected by calibration errors, linearity errors, hysteresis, Abbe errors and positioning noise.
絕對(duì)精度：實(shí)際位置與所需位置之間的偏差像樊。 如果一個(gè)平臺(tái)必須移動(dòng) 100μm尤莺，但它僅移動(dòng) 99.99μm（通過理想標(biāo)尺測(cè)量），則誤差為 10nm生棍。 沿軸的永久定位誤差稱為精度颤霎。 絕對(duì)精度受校準(zhǔn)誤差、線性誤差涂滴、滯后友酱、阿貝誤差和定位噪聲的影響。
Backlash : Backlash is a positioning error occurring upon change of direction. Backlash can be caused by insufficiently preloaded thrust or inaccurate meshing of drive components, for example gear teeth. Piezoconcept’s flexure motion translation mechanism and piezo actuator designs are inherently backlash free.
齒隙：齒隙是在運(yùn)動(dòng)方向改變時(shí)發(fā)生的定位誤差柔纵。 齒隙可能是由于預(yù)載推力不足或驅(qū)動(dòng)部件（例如齒輪齒）嚙合不準(zhǔn)確造成的缔杉。 Piezoconcept 的彎曲運(yùn)動(dòng)平移機(jī)構(gòu)和壓電致動(dòng)器設(shè)計(jì)本質(zhì)上是無間隙的。
Bandwidth : The frequency range to which the amplitude of the stage's motion is dropped by 3dB. It reflects how fast the stage can follow the driving signal.
帶寬：載物臺(tái)運(yùn)動(dòng)幅度下降的頻率范圍為3dB搁料。 它反映了平臺(tái)能夠以多快的速度跟隨驅(qū)動(dòng)信號(hào)或详。
Drift : A position change over time, which includes the e?ffects of temperature change and other environmental e?ffects. The drift may be introduced from both the mechanical system and electronics.
漂移：位置隨時(shí)間的變化，包括溫度變化和其他環(huán)境影響的影響郭计。 漂移可能來自機(jī)械系統(tǒng)和電子設(shè)備霸琴。
Friction : Friction is defined as resistance between contacting surfaces during movement. Friction may be constant or speed dependent. Because they use flexure, the nanopositioners from Piezoconcept are friction free.
摩擦力：摩擦力定義為運(yùn)動(dòng)過程中接觸表面之間的阻力。 摩擦力可以是恒定的或取決于速度的昭伸。 因?yàn)槭褂萌嵝赃B接梧乘，Piezoconcept 的納米定位器是無摩擦的。
Hysteresis : The positioning error between forward scan and backward scan. A closed-loop control is an ideal solution for this problem and is done by using a network of High Resolution silicon sensor to provide feedback signals.
滯后：前向掃描和后向掃描之間的定位誤差庐杨。 閉環(huán)控制是該問題的理想解決方案选调，它通過使用高分辨率硅傳感器網(wǎng)絡(luò)提供反饋信號(hào)來完成。
Linearity error : The error between the actual position and the first-order best fit line (straight line). Our nanopositioning products are calibrated with laser interferometry and the non linearity errors are compensated down to 0.02% of the full travel.
線性誤差：實(shí)際位置與一階最佳擬合線（直線）之間的誤差灵份。 我們的納米定位產(chǎn)品使用激光干涉儀進(jìn)行校準(zhǔn)学歧，非線性誤差補(bǔ)償?shù)椭寥谐痰?0.02%。
Orthogonality error : The angular off?set of two defined motion axes from being orthogonal to each other. It can be interpreted as a part of crosstalk.
正交性誤差：兩個(gè)定義的運(yùn)動(dòng)軸相互正交的角度偏移各吨。 它可以解釋為串?dāng)_的一部分。
Position noise : The amplitude of the stage shaking when it is on a static command. It is usually measured and specified with Peak-To-Peak value. It is a combination of the sensor noise, driver electronics noise and command noise, etc. The position noise of our stages is very limited due to the very high Signal-To-Noise ratio of the Silicon HR sensors we use.
位置噪聲：在靜態(tài)命令下載物臺(tái)晃動(dòng)的幅度袁铐。 它通常用峰峰值來測(cè)量和指定揭蜒。 它是傳感器噪聲、驅(qū)動(dòng)器電子噪聲和命令噪聲等的組合剔桨。由于我們使用的 Silicon HR 傳感器具有非常高的信噪比屉更，我們平臺(tái)的位置噪聲非常有限。
Range of motion : The maximum dISPlacement of the nanopositioners.
運(yùn)動(dòng)范圍（行程）:納米定位器的最大位移洒缀。
Resolution : The minimum step size the stage can move.
分辨率:舞臺(tái)可以移動(dòng)的最小步長(zhǎng)瑰谜。
Resonant frequency : Piezostage are oscillating mechanical systems characterized by a resonant frequency. The resonant frequency that we give is the lowest resonant frequency that can be seen on a nanopositioner. In general, the higher the resonant frequency of a system, the higher the stability and the wider working bandwidth the system will have. The resonant frequency of a piezostage is determined by the square root of the ratio of sti?ness and mass.
諧振頻率：壓電級(jí)是以諧振頻率為特征的振蕩機(jī)械系統(tǒng)欺冀。 我們給出的共振頻率是在納米定位器上可以看到的最低共振頻率。 一般來說萨脑，系統(tǒng)的諧振頻率越高隐轩，系統(tǒng)的穩(wěn)定性和工作帶寬就越寬。 壓電級(jí)的共振頻率由剛度和質(zhì)量之比的平方根決定渤早。
Silicon HR sensor : Piezoconcept use temperature compensated High-Resolution silicon sensors network for reaching highest long-term stability. This measuring device is capable of measuring position noise in the picometer range and its response is not dependent of the presence of pollutants, air pressure changes like other high-end sensors can be.
Si-HR 傳感器：Piezoconcept 使用溫度補(bǔ)償高分辨率硅傳感器網(wǎng)絡(luò)职车，以達(dá)到最高的長(zhǎng)期穩(wěn)定性。 該測(cè)量裝置能夠測(cè)量皮米范圍內(nèi)的位置噪聲鹊杖，并且其響應(yīng)不依賴于污染物的存在悴灵，應(yīng)對(duì)改變氣壓帶來的影響與其他高端傳感器一樣。
Step response time : The step response time is the time needed by the nanopositioner to do the travel from 10% of the commanded value to 90% of the commanded value. The step response time reflects the dynamic characteristics of the system and is relatively to the installation method and load of the stage.
階躍響應(yīng)時(shí)間：階躍響應(yīng)時(shí)間是納米定位器從指令值的 10% 到指令值的 90% 所需的時(shí)間骂蓖。 階躍響應(yīng)時(shí)間反映了系統(tǒng)的動(dòng)態(tài)特性积瞒，并且與位移臺(tái)的安裝方式和負(fù)載有關(guān)。
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